发明名称 Process for making a MCSFET
摘要 A process for making a MCSFET includes providing a first implant through a first side of an elongated stack, and then providing a second implant through a second side of the stack. The first implant has a dose different than the dose of the second implant, so that final dopant concentrations in the first and second sides differ and the transistor has two threshold voltages Vt1, Vt2.
申请公布号 US7682913(B1) 申请公布日期 2010.03.23
申请号 US20090359731 申请日期 2009.01.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 OUYANG XU;HSU LOUIS LU-CHEN;WANG XINHUI;YIN HAIZHOU
分类号 H01L21/336 主分类号 H01L21/336
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