发明名称 PROBE CARD AND METHOD FOR WAFER TEST USING THE SAME
摘要 PURPOSE: A probe card and a method for testing a wafer using the same are provided to minimize the number of a test by forming the probe card of which size is corresponded to the wafer in order to minimize the thermal deformation. CONSTITUTION: A circuit board(310) and a probe head body(320), units for a probe module(330) and a sub board(340) are prepared. The circuit board and the probe head body are successively stacked. The units for the probe module are arranged on the probe head body with spaced gaps. The sub board is arranged adjacent to the units for the probe module and connected to the units for the probe module.
申请公布号 KR20100031160(A) 申请公布日期 2010.03.22
申请号 KR20080090110 申请日期 2008.09.12
申请人 AMST CO., LTD. 发明人 CHUNG, IN BUHM;SONG, BYUNG CHANG;KIM, DONG IL
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
代理机构 代理人
主权项
地址