| 摘要 |
PURPOSE: A metal oxide nano wire sensor and a manufacturing method thereof are provided to remarkably improve reliability, sensitivity, reproducibility and other properties of a sensor by forming plural metal oxide(zinc oxide) nano wire junction. CONSTITUTION: A manufacturing method of a metal oxide nano wire sensor comprises the following steps: forming a trench structure(140) on the upper side of a substrate; forming a conductive layer(150) in the inner side of the trench structure; forming a catalyst layer(160) on the conductive layer; and forming a metal oxide nanowire array on the catalyst layer; and forming a heater(120) on the substrate. The heater contains a substance including platinum(Pt), lead(Pb), silver(Ag), nickel -chromium(Ni-Cr), and iron-chromium (Fe-Cr). |
