CHARGED PARTICLE-BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a charged particle-beam apparatus to independently control a probe current and an objective aperture angle, for the purpose of setting a desired probe current value and the objective opening angle in accordance with the radius of an objective aperture. SOLUTION: The charged particle-beam apparatus is formed of a structure having the objective aperture 6 between capacitor lenses 4, 7. The controlling value of a first capacitor-lens controller 60 is processed to set the desired probe current value in accordance with the radius of the objective aperture 6. The controlling value of a second capacitor-lens controller 62 is processed to set the desired objective opening angle in accordance with the radius of the objective aperture 6 and the controlling value of the capacitor-lens controller 60. The processed controlling value is set to the second capacitor-lens 62 to control the objective opening angle 43. COPYRIGHT: (C)2010,JPO&INPIT