| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a mirror device to manufacture a mirror with desired warpage quantity. <P>SOLUTION: This method includes a first step to prepare a mirror substrate having the plate-like mirror pivotably supported, a second step to form a first metal layer on one side of the mirror, a third step to form a second metal layer on the other side of the mirror, and a fourth step to place the mirror substrate on an electrode substrate and oppositely arrange an electrode and the mirror. The thickness of at least one of the surface layer 232 and the rear surface layer 233 is controlled. Thereby, the curvature quantity of the mirror 230 is controlled, and the mirror 230 with a desired radius of curvature can be manufactured. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
