APPARATUS AND METHOD FOR MONITORING WEAR OF COMPONENTS

摘要

A structure and method for instrumenting a component for monitoring wear in a coating. The method includes depositing a first thin layer of electrically insulating material, depositing a thin electrically conductive layer over the first electrically insulating layer, depositing a second thin layer of electrically insulating material over the electrically conductive layer. An overlying thickness of the coating material is deposited over the second thin layer of electrically insulating material. The thicknesses of the insulating and conducting layers is controlled to be small enough such that the overlying coating surface exposed to mechanical wear retains a desired degree of smoothness without the necessity for a separate planarization step.