| 摘要 |
<p>Provided is an ion irradiation device (10) wherein an intermediate electrode (24) having a voltage slightly lower than that of an ionizing chamber (31) is arranged between the ionizing chamber (31) and an extraction electrode (25), and the focal position of ion beams is brought closer to a first focusing device (26) by focusing the ion beams in the downstream of the intermediate electrode (24). Thus, since the ion beams are inputted to the first focusing device (26) before the ion beams greatly diffuse, the ion irradiation device having higher ion beam focusing performance is provided.</p> |
