| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an FIMS system in which loading is possible in a style of building up multiple thin pods vertically. Ž<P>SOLUTION: A suction pad is arranged on a plate on which the pod is loaded, and the pod is held and fixed on the plate by suction and holding. A tube which imparts a suction force to the suction pad is installed in an installing space inside a boxy member having a minimal spatial thickness, wherein a region where the tube can bend is present only in the inside of the installing space. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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