| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform the calibration of an applied voltage of a voltage applying circuit in a short time. Ž<P>SOLUTION: This semiconductor testing apparatus comprises a plurality of voltage applying circuits 2 for applying voltages to a DUT1 and performing a test. A calibration section for measuring the applied voltage of each of the plurality of voltage applying circuits 2 in parallel comprises an ADC 4 that is disposed for each of the plurality of voltage applying circuits 2 and measures the applied voltages of the voltage applying circuits 2, a digital comparator 10 for comparing the applied voltages with reference voltages used as references applied by the voltage applying circuits 2, a corrective voltage control section 11 that is disposed for each of the plurality of voltage applying circuits 2 and corrects the applied voltages of the voltage applying circuits 2 based on the comparison result by a voltage comparing section, and a DAC 7 whose corrective voltage is controlled by the corrective voltage control section 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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