SCANNING CHARGED PARTICLE MICROSCOPE DEVICE, AND METHOD OF PROCESSING IMAGE ACQUIRED BY THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the following problem: in a method of processing a picture acquired by a scanning charged particle microscope and a scanning charge particle microscope device, sometimes sufficiently satisfactory picture quality cannot be obtained by imaging one picture using a specific imaging condition, since the optimal imaging condition differs depending on the shape and material of a sample. SOLUTION: The sample is imaged under different imaging conditions to acquire a plurality of the pictures of the sample, and the deterioration function of each picture is created for a plurality of the acquired pictures, a picture having improved resolution is created using a plurality of the acquired pictures and the deterioration function corresponding to each picture, and the picture having improved resolution is processed. COPYRIGHT: (C)2010,JPO&INPIT