| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of obtaining fluoroscopic data of a sample from any direction and angle without rotating a sample table and accurately inspecting a state of conductive plating applied to the inner wall of a through-hole formed in a printed circuit board in a nondestructive manner. Ž<P>SOLUTION: The X-ray inspection apparatus has an X-ray generator 12 and an X-ray detector 13 opposedly arranged above and below a sample table 11 placing a sample S thereon and movable in an XY axial direction, and detects by the X-ray detector 13 X rays radiated from the X-ray generator 12 and transmitted through the sample S. The X-ray inspection apparatus includes a first rotating means 16 for rotating the X-ray detector 13 around a horizontal axis L1 passing through a fluoroscopic point P of the sample S and a second rotating means 18 for rotating the X-ray detector 13 along a circular arc assuming the fluoroscopic point P to be a center of a circle and a line segment to be a diameter, which connects two points on the horizontal axis L1 across the fluoroscopic point P, the second rotating means 18 being assembled to the first rotating means 16. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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