发明名称 VERBUNDZUSAMMENSETZUNG FÜR MIKROSTRUKTURIERTE SCHICHTEN
摘要 <p>The invention provides a composite composition comprising a cationically polymerizable organic resin, a cationic photoinitiator, a hydrolysate and/or condensate of at least one hydrolysable silane compound and inorganic nanoparticles. The composite composition is suitable for the preparation of patterned moulded articles or substrates having a patterned coating, in particular by photolithography. Micropatterns obtained show improved properties, such as a high shape stability and an excellent elastic modulus.</p>
申请公布号 DE602007004626(D1) 申请公布日期 2010.03.18
申请号 DE20076004626T 申请日期 2007.07.11
申请人 LEIBNIZ-INSTITUT FUER NEUE MATERIALIEN GEMEINNUETZIGE GMBH;CANON K.K. 发明人 KALMES, PAMELA;VEITH, MICHAEL;BECKER-WILLINGER, CARSTEN;HINO, ETSUKO;OHKUMA, NORIO;NOGUCHI, MITSUTOSHI;SAITO, YOSHIKAZU
分类号 G03F7/038 主分类号 G03F7/038
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