| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic EL element for forming a roll-to-roll line with the small number of winding in a manufacturing line wherein process pressure extends from atmospheric pressure to a vacuum in manufacturing of the organic EL element. Ž<P>SOLUTION: In the method for manufacturing the organic EL element composed of at least a process of forming a first electrode, one or more of organic functional layers, a second electrode in order on a flexible film, and a sealing film sticking process, each of the above processes is composed of an atmospheric pressure process and a vacuum process. The method for manufacturing the organic EL element also includes a process pressure replacement process of replacing the process pressure from the atmospheric pressure to the vacuum and from the vacuum to the atmospheric pressure between the atmospheric pressure process and the vacuum process, and the process pressure replacement process is formed by exhausting a chamber with a holding type gate valve with a vacuum pump. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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