| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device capable of preventing generation of a leakage current from a wiring part in a furnace under pressure reduction, while keeping cleanliness in the furnace, with a simple constitution. SOLUTION: A pressure reducing drier 10 has at least a panel heater 18 and a furnace body 12. The panel heater 18 has a single or a plurality of capillary sheath heaters 30 including a sheath part filled in a metallic pipe in a state of insulating a heating wire and a power supply wire. The furnace body 12 is constituted so as to store the panel heater 18 inside, and has a gauge port capable of inserting the sheath part in the sheath heaters 30. COPYRIGHT: (C)2010,JPO&INPIT
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