| 摘要 |
PROBLEM TO BE SOLVED: To provide a powder production method and a production device used in this method superior in productivity and controlling density of atoms or atomic groups modifying the surface. SOLUTION: The production device 1A for producing a powder P2 with the halogenated surface is provided with a first electrode 231 and a second electrode 232 to produce plasma, a powder supply part 3 supplying a powder P1 between the first electrode 231 and the second electrode 232, and a halogenation means 4 halogenating the powder P1 plasma-treated by the plasma generated between the first electrode 231 and the second electrode 232. The halogenation means 4 has a container (a reaction vessel) 43 to which the plasma-treated powder P1 is supplied, and a gas supply part 44 supplying gas containing halogen atoms into the container 43. COPYRIGHT: (C)2010,JPO&INPIT
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