METHOD AND APPARATUS FOR PRODUCING TRICHLOROSILANE

摘要

PROBLEM TO BE SOLVED: To decompose a polymer separated from a polycrystal silicon production process, a trichlorosilane production process or a conversion process so as to achieve conversion to trichlorosilane.

SOLUTION: A decomposition furnace 2 is provided with a heating means 11 which heats an interior of the decomposition furnace 2; a reaction chamber 4 which is formed in the decomposition furnace 2; a center tube 3 which is inserted in the reaction chamber 4 from the top of the decomposition furnace 2 along a longitudinal direction thereof and has a lower-end opening portion 3a facing the inner bottom face 8b of the decomposition furnace 2; raw-material-supply pipes 5 and 6 which supply the polymer and hydrogen chloride to an upper part of the reaction chamber 4 cylindrically formed at an exterior of the center tube 3; and a gas-discharge pipe 7 which leads out reacted gas from the top of the center tube 3. A fin 14 that leads the polymer and the hydrogen chloride to the lower-end-opening portion 3a of the center tube 3 under mixing in the reaction chamber 4 is formed integrally with at least one of the outer peripheral surface of the center tube 3 and the inner peripheral surface of the decomposition furnace 2.

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