| 摘要 |
PROBLEM TO BE SOLVED: To provide a relatively inexpensive coating liquid for phosphorous diffusion that prevents variations in the resistance value of a semiconductor device in which phosphorous has been diffused, can diffuse phosphorous with high concentration, and can further avoid the contamination of the semiconductor device by sodium. SOLUTION: The coating liquid for diffusing phosphorous contains: (a) a phosphorous compound, (b) a polyvinyl alcohol based resin having a sodium content of≤10 ppm, and (c) water. COPYRIGHT: (C)2010,JPO&INPIT |
