发明名称 LINEAR DRIVE CRYOGENIC REFRIGERATOR
摘要 A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
申请公布号 WO2010011403(A3) 申请公布日期 2010.03.18
申请号 WO2009US44632 申请日期 2009.05.20
申请人 BROOKS AUTOMATION, INC.;MORRIS, RONALD, N.;ANDEEN, BRUCE, R.;BARTLETT, ALLEN, J. 发明人 MORRIS, RONALD, N.;ANDEEN, BRUCE, R.;BARTLETT, ALLEN, J.
分类号 F25B9/00;F04B37/08 主分类号 F25B9/00
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