| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method which can achieve a sufficient measurement precision and the shortening of an inspection time compatibly, and can inspect the height of a bonding ribbon in addition to a bonding wire. <P>SOLUTION: The device 1 for inspection which measures the two-dimensional shape and height of a measurement workpiece 2 to inspect the measurement workpiece 2 includes a CCD camera 23 for two-dimensional shape measurement, coaxial lighting 21 installed coaxially with the CCD camera 23, a laser displacement gauge 31 for height measurement, and an XY stage 11 and a Z stage 12 for moving the CCD camera 23, laser displacement gauge 31, and measurement workpiece 2 relatively in a plane direction and a vertical direction. A predetermined threshold Th is set for measurement data obtained by the laser displacement gauge 31, and measurement data which is larger than the threshold Th and on a high side in a height direction (Z direction) is employed as the height (h) of the measurement workpiece. <P>COPYRIGHT: (C)2010,JPO&INPIT |
