| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle structure which can be reliably held and fixed to a tray during housing, transportation and storage, and to provide a pellicle-housing structure which enables a pellicle to be taken out from a housing vessel without easily causing the occurrence of strain and flexure when the pellicle is stuck to a photomask or the like. <P>SOLUTION: A large pellicle structure includes a frame body, a pellicle film adhering to the upper rim face of the frame body, an adhesive material layer formed of an adhesive material applied on the lower rim face of the frame body, and a protective film adhering to the adhesive material layer, wherein the pellicle film has an area of≥10,000 cm<SP>2</SP>. The frame body has a rectangular shape, and the protective film has a first press margin protruding outward from the frame body. The first press margin is situated on two sides including one apex of the frame body and has an L-shape along the shape of the frame body. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
