| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a multilayer ceramic substrate having a cavity. <P>SOLUTION: This method of manufacturing the multilayer ceramic substrate having a cavity includes steps of: preparing a first ceramic laminate, and second and third laminates which are provided on top and bottom surfaces of the first ceramic laminate, respectively; forming a first polymer layer of a region corresponding at least to an opening in the top surface of the second ceramic laminate, and forming a second polymer layer in a region corresponding to at least to an opening of the bottom surface of the third ceramic laminate; laminating the second ceramic laminate to position the first polymer layer in a lower part of the opening; forming a desired multilayer ceramic laminate by laminating the third ceramic laminate to position the second polymer layer in an upper part of the opening; jointing first and second restraint layers on one-side surfaces of the second and third ceramic laminates, respectively; and baking the multilayer ceramic laminate with the first and second restraint layers arranged thereon. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
