| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for treating a halogen-containing gas that enables highly efficient treatment and has a structure meeting users' needs. <P>SOLUTION: The apparatus for treating the halogen-containing gas includes: a cleaning unit 31 for removing byproducts generated in decomposition of the halogen-containing gas; a gas separation unit 321 for separating gases other than halogen-series gases from the halogen-containing gas to enrich the halogen-series gases; a gas-decomposing unit 36 for decomposing the enriched halogen-series gases; and an exhaust gas circulation unit 352 for returning the discharged gas, that has been treated in the gas-decomposing unit 36 and discharged, to the cleaning unit 31. These units are arranged orderly in series in the direction of flow of the halogen-containing gas containing the halogen-series gases supplied from a halogen-containing gas supply unit. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
