| 摘要 |
PROBLEM TO BE SOLVED: To prevent a leak in an isolation groove of an integrated type photoelectric converter and to make the width of the isolation groove narrow. SOLUTION: A method of manufacturing the photoelectric converter in which photoelectric conversion layers of adjacent photoelectric conversion cells are isolated by the isolation groove includes the steps of: applying an insulating material to the isolation groove 9 and curing the material to form an insulating portion 3; removing a part of the insulating portion 3 up to a bottom portion to form a recessed portion 5 exposing a first conductive layer extending from the photoelectric conversion cell on the other side; forming a continuous second conductive layer 6 on the photoelectric conversion layers, on the insulating portion, and in the recessed portion; and forming a groove portion 37 in the second conductive layer 6 on the insulating portion 3. COPYRIGHT: (C)2010,JPO&INPIT
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