发明名称 |
SEMICONDUCTOR MANUFACTURING PLANT |
摘要 |
Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
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申请公布号 |
US2010064969(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
US20070278407 |
申请日期 |
2007.02.07 |
申请人 |
TOYO TANSO CO., LTD.;TOKYO ELECTRON LIMITED |
发明人 |
HIRAIWA JIRO;YOSHIMOTO OSAMU;HAYAKAWA HIROSHI;TOJO TETSURO;OKABE TSUNEYUKI;ASANO TAKANOBU;WADA SHINICHI;NAKAO KEN;KATO HITOSHI |
分类号 |
H01L21/46 |
主分类号 |
H01L21/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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