发明名称 |
PELLICLE FRAME, PELLICLE AND METHOD FOR USING PELLICLE FRAME |
摘要 |
<p>Provided is a pellicle frame wherein the frame is not distorted when a pellicle film is stretched and pasted, and the pellicle frame itself follows up flexure caused by the weight of a mask even after a pellicle is pasted to the mask. A rectangular pellicle frame has a distortion factor a of 0.06% or less, the followability ß of each side of the pellicle frame expressed by the general expression (1) is 3 mm or more, the followability ß of the long side of the pellicle frame is 32 mm or less, the long side of the pellicle frame has a length of 1400-2100 mm, and the area on the inside of the pellicle frame is 15000 cm2 or more. ß=(1/flexure of pellicle)×thickness×width (1)</p> |
申请公布号 |
WO2010029997(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
WO2009JP65919 |
申请日期 |
2009.09.11 |
申请人 |
ASAHI KASEI E-MATERIALS CORPORATION;KITAJIMA, SHINTARO;KURIYAMA, HOZUMA |
发明人 |
KITAJIMA, SHINTARO;KURIYAMA, HOZUMA |
分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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