| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device that suppresses occurrence of an exposure defect. <P>SOLUTION: The exposure device includes a first movable member which is movable in a predetermined plane including a first position irradiated with exposure light, while holding a substrate, a measurement system including an encoder head disposed at the first movable member, and measuring position information on the first movable member, and a holding device for holding a scale unit including a scale plate in a releasable state at a position where it can face the encoder unit. The holding device has a support member for supporting the scale unit slidably in a direction substantially parallel with the predetermined plane. <P>COPYRIGHT: (C)2010,JPO&INPIT |
