| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a new cantilever for processing, wherein a great number of fine grooves are simultaneously processed with high accuracy by probes as a great number of cutting blades, in order to drastically shorten a process time for forming fine shapes by using functions of an atomic force microscope on a three-dimensional surface including a curved face. <P>SOLUTION: The cantilever for processing, for processing a micropattern by use of an atomic force microscope (AFM), has a great number of probes as cutting blades provided at the top end of a lever part of a cantilever, and has the probes integrally formed with a common base material. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
