| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cycle time for discharging droplets onto a substrate. SOLUTION: The method of manufacturing a pattern film forming member in which a pattern film is formed on a substrate includes a substrate mounting process of mounting the substrate on a table, an application process of, while moving relatively a discharging head discharging a liquid serving as a material for the pattern film onto the substrate in the form of droplets and the table mounted with the substrate, discharging the droplets onto the substrate from the discharging head to apply the liquid to the substrate and a solidifying process of solidifying the liquid applied to the substrate. In the substrate mounting process, the substrate is mounted on the table so as for the end part of the substrate to access the discharge head, in a view from above. COPYRIGHT: (C)2010,JPO&INPIT |
