| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar actuator, performing accurate position detection of a movable part while reducing the size. Ž<P>SOLUTION: The planar actuator comprises: a frame-like fixing part set on a device substrate; a movable part 4 rotatably supported on the inside of the fixing part through a torsion bar and driven by a drive means; a structural color developing body 8 which is set on the surface of the movable part 4 and reflects different colors according to the incident angle of light; a light emitter 9 which emits light to the structural color developing body 8; and a light receiver 10 which receives the light emitted from the light emitter 9 and reflected by the color developing body 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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