| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact linear motor driving and feeding device for increasing a control gain by suppressing the oscillation of a base. Ž<P>SOLUTION: The linear motor driving and feeding device 1 includes: a support base body 121 guided movably relative to a base 7 and relatively movable with regard to a movable base body 111, and a spring element and damper element 20 attached between the support base body and the base so as to work on the moving direction of the support base body. The spring element and the damper element constitute a compact reaction offsetting oscillation system, thereby reducing the device in size. Furthermore, the oscillation frequency of the reaction offsetting oscillation system is drastically decreased than the drive frequency of a linear motor, so that the reaction force transferred to the base are reduced to a several tenth part of the thrust of the linear motor and to minimize the force of oscillating the base, with highly precise feeding control. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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