发明名称 |
VACUUM PROCESSING APPARATUS |
摘要 |
A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor.
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申请公布号 |
US2010068009(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
US20090388617 |
申请日期 |
2009.02.19 |
申请人 |
KIMURA SHINGO;OKIGUCHI SHOUJI;KAGOSHIMA AKIRA;OBAMA SHINJI |
发明人 |
KIMURA SHINGO;OKIGUCHI SHOUJI;KAGOSHIMA AKIRA;OBAMA SHINJI |
分类号 |
H01L21/67;H01L21/00;H01L21/673;H01L21/677 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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