| 摘要 |
An angular velocity sensor element includes a main body having three vibrator portions including a vibrator portion that is vibrated in a first phase and a vibrator portion that is vibrated in a second phase opposite to the first phase, a first detecting piezoelectric layer that detects a vibration of the vibrator portion vibrated in the first phase and is formed on the vibrator portion vibrated in the first phase, a second detecting piezoelectric layer that detects a vibration of the vibrator portion vibrated in the first phase and is formed on the vibrator portion vibrated in the first phase and disposed away from the first detecting piezoelectric layer, and a driving piezoelectric layer that vibrates the vibrator portion that is vibrated in the second phase and is formed on the vibrator portion vibrated in the second phase and disposed away from the first and second detecting piezoelectric layer.
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