| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection tool having an electrode section reaching a stable continuity contact state. SOLUTION: The substrate inspection tool 1 includes: a plurality of rod-like members 2 having conductivity where one end is pressure-welded to an inspection point; an electrode body 4 that has an electrode section 41 disposed opposite to the other end to allow continuity connection to the other end and is electrically connected to a substrate inspection apparatus; a guide hole 311 for guiding one end of the rod-like member 2 to a prescribed inspection point; a coil spring 410 that has a holding body 3 having a connection hole 351 for guiding the other end of the rod-like member to the prescribed electrode section 41, while the electrode section 41 abuts on the surface of the other end and is stretched in the direction of the long axis of the rod-like member for continuity connection to the other end of the rod-like member 2; a coarsely wound section 411 having a conductor section 44 that performs continuity connection to the coil spring 410 and is electrically connected to the substrate inspection apparatus, while the coil spring 410 is subjected to continuity contact with the other end of the rod-like member 2; and a densely wound section 412 that is continuous to the coarsely wound section and is electrically connected to the conductor section 44. COPYRIGHT: (C)2010,JPO&INPIT |
