| 摘要 |
PROBLEM TO BE SOLVED: To decompose a polymer separated from a polycrystal silicon production process, a trichlorosilane production process or a conversion process so as to achieve conversion to trichlorosilane. SOLUTION: A decomposing furnace 2 is provided with a heating unit 8 heating the inside of the decomposing furnace 2; a raw material supplying tube 3 for guiding the polymer and hydrogen chloride to the inner bottom portion of the decomposing furnace 2 along a longitudinal direction thereof and supplying those from a lower end opening 3a into the decomposing furnace 2; and a gas discharge tube 4 for discharging reaction gas from the top of a reaction chamber 13 formed between the outer peripheral surface of the raw material supplying tube 3 and the inner peripheral surface of the decomposing furnace 2. A fin 14, which guides a fluid mixture of the polymer and the hydrogen chloride supplied from the lower end opening 3a of the raw material supplying tube 3 to be agitated and rise upward in the reaction chamber 13, is formed integrally with at least one of the outer peripheral surface of the raw material supplying tube 3 and the inner peripheral surface of the decomposing furnace 2. COPYRIGHT: (C)2010,JPO&INPIT |
