| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate having a projecting part of a desired shape and high flatness with ease and high accuracy at a high throughput. Ž<P>SOLUTION: In the manufacturing method includes steps of: applying a solution formed by dissolving a structural material which constitutes a projecting part in a solvent on a substrate base material provided with a sacrifice layer in which a recessed part is formed to fill the recessed part with the solution; drying the solvent of the solution filled in the recessed part to form the projecting part; and removing the sacrifice layer so that the projecting part remains. A contact angle θ of the sacrifice layer to the solution is <90°. A value d determined by L×(1-sinθ)/(2cosθ) is <10 nm when the minimum distance between side surfaces of the recessed part passing through the center of gravity of the cross section parallel to the surface of the substrate base material is L. The smaller one of the distance between the position farthest from the substrate base material and the surface of the substrate base material when the recessed part is filled with the solution, and the depth of the recessed part, is d or larger. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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