发明名称 LEVITATION UNIT AND CONTACTLESS SUPPORT DEVICE WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To remarkably reduce the risk that a rockable body is unexpectedly tilted by the weight thereof to damage a workpiece. SOLUTION: A spherical section 35 of a support body 30 is housed in a spherical bearing section 28a of a body 20, and the body 20 is rockably supported by the support body 30. In the body 20, there are provided an O-ring 29 making contact with the spherical section 35, and also a closed space K1 sealed by the O-ring 29. Further, through a pressurizing port 41 and an inner pressure adjusting path 42, pressurized air is supplied to the closed space K1. When the support body 30 is in a fixed state, if the pressure in the closed space K1 is increased by supply of the pressurized air, the increase in the inner pressure lifts up the body 20 relative to the support body 30. This increases frictional resistance at a part A to suppress a tilt of the body 20 due to the weight thereof. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010060013(A) 申请公布日期 2010.03.18
申请号 JP20080224745 申请日期 2008.09.02
申请人 CKD CORP 发明人 ITO HIDEKAZU;HAYASHIMOTO SHIGERU
分类号 F16C32/06;F16C11/06;F16C11/10;F16C23/04;H01L21/683 主分类号 F16C32/06
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