发明名称 |
Apparatus and method for making carbon nanotube array |
摘要 |
An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet, a quartz boat disposed in the reaction chamber, a substrate with a surface deposited with a film of first catalyst, and a second catalyst disposed in the quartz beside the substrate. The substrate is disposed in the quartz boat.
|
申请公布号 |
US2010064973(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
US20090590663 |
申请日期 |
2009.11.12 |
申请人 |
TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
JIANG KAI-LI;LIU KAI;FAN SHOU-SHAN |
分类号 |
C23C16/458;C23C16/00 |
主分类号 |
C23C16/458 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|