发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>Provided is a semiconductor device, wherein a gate insulating film (5) is formed on a first conductivity type semiconductor region (1a), a gate electrode (6) is formed on the gate insulating film (5), and on a side surface of the gate electrode (6), a first offset spacer (7a), a second offset spacer (7b) and a side wall (10) are sequentially formed. Furthermore, a second conductivity type extension region (8) is formed below a side of the gate electrode (6) in the semiconductor region (1a), and a first conductivity type pocket region (9) is formed below the side of the gate electrode (6) below the extension region (8) in the semiconductor region (1a).</p> |
申请公布号 |
WO2010029681(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
WO2009JP03473 |
申请日期 |
2009.07.23 |
申请人 |
PANASONIC CORPORATION;YAMASHITA, KYOUJI;IKOMA, DAISAKU;KAMEI, MASAYUKI |
发明人 |
YAMASHITA, KYOUJI;IKOMA, DAISAKU;KAMEI, MASAYUKI |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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