发明名称 |
APPARATUS FOR MANUFACTURING SILICON INGOT |
摘要 |
PURPOSE: An apparatus for manufacturing a silicon ingot is provided to make the silicon ingot with high cultivation by controlling a temperature of a heating unit. CONSTITUTION: A crucible(120) is installed inside a chamber(110). A heating unit(130) heats the crucible. The crucible is loaded on a crucible mounting unit(140). A water cooling load group(151-153) is formed under the crucible mounting unit. The water cooling load group is separately installed from the center of the crucible mounting unit to the outside and is connected to water supply units.
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申请公布号 |
KR100947836(B1) |
申请公布日期 |
2010.03.18 |
申请号 |
KR20090091632 |
申请日期 |
2009.09.28 |
申请人 |
SEMIMATERIALS. CO., LTD. |
发明人 |
LEE, GEUN TEK;PARK, SUNG EUN;PARK, JONG HOON |
分类号 |
C30B21/02 |
主分类号 |
C30B21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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