EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To correct deviation in ejecting direction of liquid droplets of a target material in order to stabilize an EUV output of an EUV light source device.

SOLUTION: The extreme ultraviolet light source device includes: a liquid droplet generation device 110 by which liquid droplets 101 of the target material are output toward a preset plasma emission point 103; a charging device 130 by which the liquid droplets 101 of the target material are charged; a trajectory correction device 140 by which an electric field or an magnetic field is formed in a trajectory so that the advancing direction of the charged liquid droplets 101a of the target material is corrected so as to be directed to the plasma emission point 103, and a laser light source 150 which forms plasma by irradiating laser beams to the charged target material at the plasma emission point 103.

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