| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a multilayer substrate for manufacturing a highly accurate multilayer substrate with high manufacturing efficiency by suppressing hydrolysis reaction of a thermosetting resin even if a laminated material is heated quickly. <P>SOLUTION: In the method of manufacturing the multilayer substrate, the heating process of a laminated material of a resin film formed of a thermosetting resin includes a first heating step constituted with a first temperature raising process and a first temperature holding process and a second heating step constituted with a second temperature raising process to be executed after the first heating step and a second temperature holding process, the maximum temperature raising rates of the laminated material in the first and second temperature raising processes are respectively 20°C/min or more, the holding temperature in the first temperature holding process is 150°C or more and 250°C or less, the temperature holding time in the first temperature holding process is one minute or more and 10 minutes or less, and the holding temperature in the second temperature holding process is identical to the fusing temperature of the thermosetting resin. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
