| 摘要 |
PROBLEM TO BE SOLVED: To provide an image measurement system and a computer program that can specify measuring conditions based on feature quantity information inherent in images of a measuring object. SOLUTION: In the system, a shape of the measuring object is measured based on the images obtained by providing on an imaging element an image of transmitted light or reflection of the light irradiated on a stage where the measuring object is placed. The feature quantity information inherent in images of the measuring object is memorized by associating with information on measuring conditions for this measuring object. Images of the measuring object obtained from imaging with the imaging element are displayed within the limit of visual field to extract the feature quantity information based on images of the measuring object. Then it is determined whether any feature quantity information nearly consistent with the above extracted feature quantity information is memorized or not. If it has determined to be memorized, the shape of the measuring object is measured based on the measuring condition-related information memorized in association with the above feature quantity information. COPYRIGHT: (C)2010,JPO&INPIT
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