| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflective type scatterometer suitable for sample survey. <P>SOLUTION: The reflective type scatterometer includes a parabolic mirror, a light source, a first reflecting mirror, a second reflecting mirror, and a receiver. The parabolic mirror has an optical axis and a parabolic surface, a sample is positioned at the focal point of the parabolic surface, and the direction of a normal of the sample is in parallel with the optical axis. The light source is suitable for the formation of a collimated beam. The first reflecting mirror reflects the collimated beam toward the parabolic surface, and the parabolic surface reflects the collimated beam toward the sample to form a first refraction beam. The parabolic surface successively reflects the first diffraction beam toward the second reflecting mirror, and the second reflecting mirror reflects the first diffraction beam toward the receiver. <P>COPYRIGHT: (C)2010,JPO&INPIT |
