| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a steam generator, steam generating method and substrate processing device, increasing the concentration of generated steam of an organic solvent, and efficiently heating the organic solvent. <P>SOLUTION: This steam generator 10 includes: passage pipes 14, 16, 18; a liquid organic solvent supply part 30 for supplying a liquid organic solvent to one end of the passage pipe 14; and heating parts 20, 22, 24 for heating the passage pipes 14, 16, 18. The passage pipes 14, 16, 18 are formed to increase in sectional area as they go from each one end toward the other end. The liquid organic solvent supplied to one end of the passage pipe 14 is heated so that the steam of the organic solvent flows out from the other of the passage pipe 18. The substrate processing device 60 includes the above steam generator 10. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
