发明名称 DICING METHOD AND DICING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dicing method and a dicing device with which efficient dicing is performed without lowering the availability of the dicing device. SOLUTION: The dicing device includes two processing means which are a first spindle 22 and a second spindle 23, and a first work table 24 and a second work table 25. Alignment is carried out according to a processing schedule line of a work mounted on the first work table 24. Consequently, when a plurality of processing schedule lines formed on the work are more inclined than a preset angle, more than a parallel state, the work is processed with only the first spindle 22, and the second spindle 23 moves to the second work table 23 to process the work on the second work table. When the plurality of processing schedule lines formed on the work are in the parallel state, the work on the first work table 24 is processed with the first spindle 22 and the second spindle 23 simultaneously. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010062435(A) 申请公布日期 2010.03.18
申请号 JP20080228276 申请日期 2008.09.05
申请人 TOKYO SEIMITSU CO LTD 发明人 SUZUKI TOMOHIRO
分类号 H01L21/301 主分类号 H01L21/301
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