| 摘要 |
An inspection unit includes: a metal block having a through hole; a contact probe for grounding which is coaxially arranged in through hole; and a coil spring having electrical conductivity at least on a surface thereof and provided between an inner peripheral face of the through hole and an outer peripheral face of the contact probe. The coil spring includes: a first coil part a part of which is in contact with the inner peripheral face of the through hole; and a second coil part a part of which is in contact with the outer peripheral face of the contact probe.
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