发明名称 |
PARALLEL-PLATE STRUCTURE FABRICATION METHOD AND PARALLEL-PLATE STRUCTURE ARRANGEMENT |
摘要 |
A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards. |
申请公布号 |
US2010067167(A1) |
申请公布日期 |
2010.03.18 |
申请号 |
US20070440743 |
申请日期 |
2007.09.14 |
申请人 |
VALTION TEKNILLINEN TUTKIMUSKESKUS |
发明人 |
RIEKKINEN TOMMI;MATTILA TOMI |
分类号 |
H01G7/06;H01G4/06;H01L41/29;H01L41/39 |
主分类号 |
H01G7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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