发明名称 Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions
摘要 Electrochemical fabrication processes and apparatus for producing multi-layer structures include operations or means for providing enhanced monitoring of build operations or detection of the results of build operations, operations or means for build problem recognition, operations or means for evaluation of corrective action options, operations or means for making corrective action decisions, and operations or means for executing actions based on those decisions.
申请公布号 US2010065432(A1) 申请公布日期 2010.03.18
申请号 US20090624257 申请日期 2009.11.23
申请人 MICROFABRICA INC. 发明人 COHEN ADAM L.;LOCKARD MICHAEL S.;SMALLEY DENNIS R.;KILGO, III MARVIN M.
分类号 C25D5/02;B81B3/00;C25D1/00;C25D5/12;C25D21/12;G01P15/08;G01P15/125;H01L21/288;H01L21/48;H01L21/768;H01P1/202;H01P3/06;H01P5/18;H01P11/00;H05K3/24;H05K3/46 主分类号 C25D5/02
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