摘要 |
Disclosed is a high frequency resonator using a quartz substrate with Euler angles, to which chemical wet etching can be applied. A Lamb wave-type elastic wave element in which at least one interdigital transducer for producing a Lamb wave-type elastic wave, or said transducer and a reflector, is/are placed on a quartz substrate, and the cut surfaces of said quartz substrate and the direction of propagation of the Lamb wave-type elastic wave displayed as Euler angles (?, µ, ?) satisfy any of the equations below (Equation 1 to Equation 3). (Equation 1) ? = -12.0° to -8.0°, µ = 121.0° to 125.0°, ? = 138.0° to 142.0° (Equation 2) ? = 108.0° to 112.0°, µ = 121.0° to 125.0°, ? = 138.0° to 142.0° (Equation 3) ? = 228.0° to 232.0°, µ = 121.0° to 125.0°,? = 138.0° to 142.0°
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