发明名称 METHOD OF FORMING NANOTUBE VERTICAL FIELD EFFECT TRANSISTOR
摘要 <p>A nanotube field effect transistor and a method of fabrication are disclosed. The method includes electrophoretic deposition of a nanotube to contact a region of a conductive layer defined by an aperture. Embodiments of the present disclosure provide a method of depositing nanotubes in a region defined by an aperture, with control over the number of nanotubes to be deposited, as well as the pattern and spacing of nanotubes. For example, electrophoretic deposition, along with proper configuration of the aperture, allows at least one nanotube to be deposited in a target region with nanometer scale precision. Pre-sorting of nanotubes, e.g., according to their geometries or other properties, may be used in conjunction with embodiments of the present disclosure to facilitate fabrication of devices with specific performance requirements.</p>
申请公布号 EP2162919(A1) 申请公布日期 2010.03.17
申请号 EP20080836707 申请日期 2008.06.20
申请人 NEW JERSEY INSTITUTE OF TECHNOLOGY 发明人 FARROW, REGINALD, C.;GOYAL, AMIT
分类号 H01L29/775;H01L51/40 主分类号 H01L29/775
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